光罩

Aligner Mask

詳細介紹
Size Thickness Material Spec. Capability
4" x 4" 0.06" / 0.09" Quartz / Soda lime 0.5 ± 0.05um (Quartz)
2.0 ± 0.2um (Soda lime)
5" x 5" 0.09"
6" x 6" 0.09" / 0.12"
7" x 7" 0.12"
9" x 9" 0.12"
14" x 14" 0.12" / 4.8mm
420 x 520mm
~
1100 x1100mm
4.8mm / 5.0mm / 
7.8mm / 8.0mm